Titanium Aluminum Silicon(TiAlSi) Sputtering Target
Material: Ti+Al+Si
Purity: 99.9~99.99%
Shape: plate , rotary , round , granules, powder etc
Size: Customized
Packing: Vacuum packing
Usage: Thin film coating , PVD coating
High Purity Materials with smooth surface, Low content of residual impurities